Home Capabilities

Nanofabrication & Metrology

What I can actually do at the bench

Thirteen years of hands-on work in three areas that keep coming back: growing carbon by chemical vapour deposition, patterning materials that resist being patterned, and measuring the result with a scanning probe.

Each section below has two halves. What I can do for you is the practical capability. Method development is what was new about it and why it was needed — for readers who care how it works. Papers and patents are linked as evidence throughout.

01 · Growth

Chemical vapour deposition of carbon

Graphene, monolayer amorphous carbon, and single-walled carbon nanotubes — grown, not bought. I have built and tuned reactors, developed non-standard chemistries, and taken films from first deposit to a specification someone else has to meet.

  • Graphene CVD, including hydrogen-free routes. Ambient-pressure synthesis producing millimetre-scale single crystals via the Boudouard reaction — no hydrogen, no vacuum. Useful when the standard recipe is blocked by safety, cost, or substrate compatibility.
  • Layer-by-layer amorphous carbon growth. Atomically thin films with controlled thickness and no grain boundaries, which is what makes them viable as diffusion barriers and ultralow-k dielectrics.
  • Aerosol CVD of single-walled nanotubes. Spark-discharge generator design and reactor tuning to hit target diameter, length, and film conductivity — including the role of ex situ nucleation in controlling the product.
  • Growth on awkward substrates. Graphene directly on dielectrics, with percolation and coverage control rather than transfer-after-growth.
  • Diagnosing a reactor that isn't behaving. Most CVD problems are not the recipe. Reading the failure from the film rather than the log is the part that takes years.

02 · Patterning

Advanced and gentle nanolithography

Electron-beam, optical, and AFM-based lithography — plus a decade spent on the harder problem: patterning materials that conventional resists, solvents, and plasma destroy before you can measure them.

  • Standard nanofabrication. Electron-beam and optical lithography, lift-off, etch, contact definition on 2D materials and thin films.
  • Biocompatible and water-processable resists. Chitosan-based lithography that patterns bio-organic and soft samples without organic solvents or plasma. Patented; first inventor.
  • Liquid-free patterning. Dry routes for nanotube films where any wet step collapses the network by capillary action.
  • AFM-based lithography. Direct mechanical and electrical patterning with a probe, including multicomponent van der Waals heterostructures — where you need to modify one layer without touching the ones beneath it.
  • Transfer, stacking, and assembly. Exfoliation and deterministic transfer of 2D materials; sub-percolating nanotube film transfer for thin-film transistor arrays.
  • Process selection advice. Given a fragile material and a target structure, which of the above will work and which will quietly ruin the sample.

03 · Metrology

Atomic force and scanning probe microscopy

Thirteen years on scanning probes, from building my own tips at ISSP RAS to teaching AFM practicals and giving invited talks on PeakForce methods. This is the technique I know best.

  • PeakForce QNM nanomechanics. Quantitative modulus, adhesion, and deformation mapping — the method behind the adhesion and overcoat work on amorphous carbon. Invited talk on its application to low-dimensional carbon.
  • Magnetic force microscopy. Including PeakForce MFM on magnetic nanostructures and vortex imaging in superconducting films.
  • Scanning tunnelling microscopy and electron-transport-correlated probe work.
  • Probe fabrication. Conductive carbon-nanotube SPM probes made in-house, fast and reproducibly — when commercial tips are not sharp, stiff, or conductive enough.
  • AFM as a fabrication tool, not just a camera: ultradensification of nanotube networks, mechanical patterning of heterostructures.
  • Imaging the difficult cases. Visualising graphene on non-conductive substrates using only standard mechanical channels — no conductive mode, no special substrate.
  • Reading someone else's data. A second opinion on existing scans, artefact identification, and whether a published number is supported by the image it came from.

04 · Supporting

Spectroscopy and transport

The measurements that turn a film into a number someone can design against.

  • Terahertz and infrared spectroscopy of thin films and networks — conductivity, carrier dynamics, and doping response in nanotube and carbon films.
  • Impedance spectroscopy down to single-object scale, including individual bacterial nanofilaments.
  • Charge transport and noise measurement on nanoscale devices.
  • In situ electrochemistry — lithium plating and stripping dynamics, electrocatalytic interfaces.
  • Dielectric characterisation, including the ultralow-k measurements underlying the interconnect work.

Reference

Technique index

The short version, for scanning.

Graphene CVD
Ambient-pressure and hydrogen-free routes; millimetre-scale single crystals; growth on dielectrics
Amorphous carbon growth
Layer-by-layer atomically thin films, thickness control, no grain boundaries
Aerosol CVD of SWCNTs
Spark-discharge generation, reactor tuning, diameter and length control
Electron-beam lithography
Device definition on 2D materials and thin films
Optical lithography
Contact and mask-based patterning, lift-off, etch
AFM lithography
Mechanical and electrical probe patterning; van der Waals heterostructures
Biocompatible resists
Chitosan-based, aqueous develop and strip; patented
Liquid-free patterning
Dry routes for capillary-sensitive nanotube networks
2D transfer & stacking
Exfoliation, deterministic transfer, heterostructure assembly
PeakForce QNM
Quantitative modulus, adhesion and deformation mapping
Magnetic force microscopy
PeakForce MFM; vortex imaging in superconductors
Scanning tunnelling microscopy
Surface structure and local electronic characterisation
SPM probe fabrication
Conductive carbon-nanotube tips, in-house
THz & IR spectroscopy
Conductivity and carrier dynamics in films and networks
Impedance spectroscopy
Down to single-object scale; dielectric response
Transport & noise
Nanoscale device measurement and interpretation
In situ electrochemistry
Lithium plating and stripping; catalytic interfaces
Data & modelling
Python, C++, Java; analysis pipelines; experiment–simulation integration

Need one of these done, or checked?

Most engagements start with a short call to work out whether the technique fits the problem. If it doesn't, I will say so.